durusmail: mems-talk: Morphology of sputtered film
Morphology of sputtered film
2004-11-07
Is LPCVD oxide film really conformal
2004-11-08
Re: Is LPCVD oxide film really conformal
2004-11-08
2004-11-09
Morphology of sputtered film
FENG Chun Hua
2004-11-07
Dear Members,
   Did any body have experience in controlling the morphology of the
sputtered film on a porous/smooth substrate? I wonder one or more
sputtering parameters may achieve discontinuous/continuous film. Any
suggestion will be greatly appreciated.

Allen


--


reply