Allen, You may read this reference for some hints on the morphology of sputtered film: J. A. Thornton, "The microstructure of sputter-deposited coatings," J. Vac. Sci. Technol. A 4, pp.3059 (1986) Yours sincerely, Isaac Chan Ph.D. Candidate Dept. Electrical & Computer Engineering University of Waterloo 200 University Ave. W Waterloo, Ontario, N2L 3G1, Canada Tel: (519) 888-4567, ext. 6014 iwchan@venus.uwaterloo.ca http://www.ece.uwaterloo.ca/~a-sidic -------------------------------------------------------------------- My experience is on a-Si:H TFT design and semiconductor processing: http://resumes.hotjobs.com/iwchan2004/procengineer6yr -------------------------------------------------------------------- On Sun, 7 Nov 2004, FENG Chun Hua wrote: > Dear Members, > Did any body have experience in controlling the morphology of the > sputtered film on a porous/smooth substrate? I wonder one or more > sputtering parameters may achieve discontinuous/continuous film. Any > suggestion will be greatly appreciated. > > Allen > > > -- > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ >