Hello All,

Listed from top to bottom, I have these layers:
8 micron AZ P4620 photoresist (spun on)
..5 micron gold (ebeam at ~10e-6 torr, 5A per sec)
10 micron PDMS (spun on)
glass substrate

When I expose with UV light, gas bubbles form between the gold and the
PDMS. They do not form if there is no photoresist.

Any ideas on where the bubbles come from and how to get rid of them?


-Rick Giuly
 GA Tech