Rick,

How can you deterimed that it is gas bubbles?

If you use sylgard 184, there are curing-agent particles existing. Those
particles are also transparency!

Good luck,

Lydia


Quoting Rick Giuly :

> Hello All,
>
> Listed from top to bottom, I have these layers:
> 8 micron AZ P4620 photoresist (spun on)
> ..5 micron gold (ebeam at ~10e-6 torr, 5A per sec)
> 10 micron PDMS (spun on)
> glass substrate
>
> When I expose with UV light, gas bubbles form between the gold and the
> PDMS. They do not form if there is no photoresist.
>
> Any ideas on where the bubbles come from and how to get rid of them?
>
>
> -Rick Giuly
>  GA Tech
>
>
>
>
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