See my dissertation, online at
http://www-bsac.eecs.berkeley.edu/archive/kirt_williams_phd.zip,
p. 161, for data on sputtered titanium resistiviy vs. deposition conditions.
I measured 1e-6 to 2.5e-6 ohm-m (not ohm-cm).
    --Kirt Williams

----- Original Message -----
From: "Imran Ghauri" 
To: 
Sent: Wednesday, January 05, 2005 12:05 PM
Subject: [mems-talk] Ti and Cr resistivity


> Hi,
>
> I'm looking for Ti thin film resistiivty and Cr thin
> film resistivity. Resistivity vs. temp. data of these
> thin films will also be appreciated.
>
> Thanks
>
> Imran
> University of Arkansas
>
>
>
>
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