Dear Klaus,

why does the resistivity decrease with increasing temperature for Ti an Cr
thin films?

This trend is expected for semiconductors, not pure metals.

Best regards,

Damiano

----- Original Message -----
From: "MT Klaus Beschorner" 
To: 
Sent: Thursday, January 06, 2005 11:21 AM
Subject: [mems-talk] Ti and Cr resistivity


> > I'm looking for Ti thin film resistiivty and Cr thin
> > film resistivity. Resistivity vs. temp. data of these
> > thin films will also be appreciated.
>
> Both materials are highly reactive, so resistivity will strongly
> depend on base vacuum/leakup rate of the deposition equipment.
> And, I mean, REALLY STRONGLY depend!
>
> For our PVD equipment, we spec:
> Ti <65 micro-Ohm-cm at 300 C
> Cr <35 micro-Ohm-cm at 300 C
> actual values are usually ca. 10% lower.
>
> The higher the temperature, the lower the resistivity, under
> clean conditions. This is often masked by increased out-gassing
> of chamber parts at higher temperature.
>
> best regards,
> klaus
>
> --
> Klaus Beschorner
> Metron Technology, European Applications Manager
> Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683
>
>