durusmail: mems-talk: pdms
pdms
2005-01-07
2005-01-07
pdms
Michael Cooke
2005-01-07
I was hoping someone could offer some insight into pdms. Firstly i want to make
a mask with holes in, but have only relatively small (in terms of height)
structures. I have been trying SU8 with sputtered gold ontop as the original
structure. However the pdms seams t orip when lifting off if it is kept thin.
any solutions.

Secondly can anyone tell me a good technique to ensure irreversible adhesion

thanks

Dr. Michael Cooke
Microsystems Technology Group
School Of Engineering
University of Durham
Durham
DH1 3LE
Phone: +44 (0)191 3342535
Fax:      +44 (0)191 3342407
Email:   m.d.cooke@physics.org
Webpage Http://www.dur.ac.uk/microsystems.technology
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