durusmail: mems-talk: review on HF etching
review on HF etching
2005-02-21
2005-02-22
review on HF etching
mi orni
2005-02-21
Dear colleague,
I'm looking for a paper that discusses the underetch formed by HF etching
for different types of glass (pyrex, borofloat,...). Will this be different?

The other paper I'm looking for is a review on masking materials for HF
etching.

Thanks!
Best regards,
mi

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