durusmail: mems-talk: review on HF etching
review on HF etching
2005-02-21
2005-02-22
review on HF etching
Dwayne Dunaway
2005-02-22
Hello,

I do not have any reviews for you but I have been doing a bit of glass etching
in HF lately.

I am doing about a 140 um etch in 49% HF.  I have not seen much difference in
etch rates between different borosilcates.  Soda lime was mess...hard to even
find my glass through all the deposites.

I have used both amorphous silicon (7500A with PEVCD) and Gold (5000A with 100A
Cr).  I think the amorphous silicon held up a bit better but the jury is still
out.  In either case, make sure your substrate is extremely clean.

Let me know if you find any good reviews,

Dwayne

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