durusmail: mems-talk: PDMS thickness variation with spin speed and time.
PDMS thickness variation with spin speed and time.
PDMS thickness variation with spin speed and time.
Kapil Sahasrabudhe
2005-03-15
Hi,

I want to spin coat a 500 micron PDMS (Sylgard 184) layer on a Si wafer. I
have been trying to find any published literature presenting variation in
PDMS layer thickness with spin speed and spin time, but haven't find any. I
would appreciate your suggestions.

Thanks

Kapil

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