durusmail: mems-talk: PDMS thickness variation with spin speed and time.
PDMS thickness variation with spin speed and time.
PDMS thickness variation with spin speed and time.
Gary
2005-03-15
Kapil, that is a monsterously thick layer to spin on, which probably
explains your inability to find a reference.  If you really need such a
thick layer perhaps another technique such a lamination of another
substrate might be inorder. Gary

Gary Hillman
Service Support Specialties, Inc.

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