durusmail: mems-talk: Re: Any sources for Silicon Nitride?
Re: Any sources for Silicon Nitride?
1998-02-20
1998-02-20
1998-02-20
1998-02-20
1998-02-20
1998-02-20
Re: Any sources for Silicon Nitride?
Jay Mathews
1998-02-20
>Hi folks,
>I wonder if anyone knows how to grow low stress silicon nitride
>for Xray mask membrane use?  Or if anyone knows places that can grow high
>quality low stress silicon nitride membrane for a cost?  Any info is
>appreciated and can help out all UW-Madison X-ray research groups greatly.
>
>Thanks
>Joseph Su
>


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