Joseph,

        I was a grad student at UW in the MEMS area. For many
years I worked with Greg Cibuzar at UM-Minneapolis and they used
to do low stress nitride deposition for me for the x-ray mask
purposes. He is the lab manager and the following is his address:


Greg Cibuzar, Manager               (612) 625-8079
Microtechnology Laboratory          (612) 625-5012 fax
University of Minnesota
Room 1-165 EECS Building
200 Union Street SE
Minneapolis, MN   55455             e-mail: cibuzar@ee.umn.edu

Microtechnology Laboratory WWW site:  http://www.ee.umn.edu/groups/mtl/


Just let him know that you want the same recipe as he used to
do for me. Let me know if you have any more questions.
Good luck.

--Reza