durusmail: mems-talk: Au Thickness vs. Conductivity
Au Thickness vs. Conductivity
Au Thickness vs. Conductivity
John Maloney
2005-05-24
> does anyone have a reference or chart for the film thickness
> of Au. and
> its conductivity (electrical). I would like to know how thin
> (<100nm)I
> can go before I start to lose conductivity throughout the
> entire film.
> I am depositing on glass with a 10nm Ti adhesive layer.

Hi Ed,

   Check Koch et al, "Resistivity-noise measurements in thin gold films
near the percolation threshold" in Phys Rev B, 32(10), 1985.  Note that
the resistance-thickness relationship will be strongly affected by
surface conditions, including the adhesion layer material and
microstructure.  The results in your lab may not match literature
reports.  Hope this helps,

John Maloney
MicroCHIPS, Inc.
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