> does anyone have a reference or chart for the film thickness of Au. and
> its conductivity (electrical). I would like to know how thin (<100nm)I
> can go before I start to lose conductivity throughout the entire film.
> I am depositing on glass with a 10nm Ti adhesive layer.

Gold resistivity (as-deposited) will stromgly depend on substrate
temperature. Thicker films may introduce unwanted substrate heating.

Electron mean free path in Gold at 25degC is 38nm, and resistivity increase
by film surface scattering of electrons is (thickness in units of
el. mean free path):

Thk.   Resistivity vs. bulk film
  1      1.46
  2      1.22
  5      1.08
20      1.02
50      1.01

best regards,
Klaus Beschorner
Metron Technology, European Applications Manager
Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683