Greetings,
Before we can begin to address your questions neither material will be fully
cured at .< than 200 degrees C
Regards
Walter
www.elume.com

-----Original Message-----
From: Fabio Altomare [mailto:altomare@phy.duke.edu]
Sent: Wednesday, June 29, 2005 7:02 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Gate insulator

Dear All

I am looking for some dielectric as gate insulator.
As far as I can tell from reading the list archives, the most common are:
1) BCB
2) Spin-on glass
3) Polyimide
After depositing the dielectric, I will need to do e-beam lithography
(PMMA as resist and MIBK as developer) and evaporate metallic gates.
The highest temperature I would like to use for curing should be <=200
Celsius and the dielectric should be <500 nm thick.
Can anyone suggest if any of the above dielectric might be
better than the others? Also, has anyone ever used additives to
cross link PMMA with UV
Thank you very much

Fabio

--
Fabio Altomare
Post Doctoral Research Associate
Physics Department
Duke University