Dear Fabio, I do not have experience with the best of the three for your purpose but could suggest that the typical dielectric coefficients for the SOG can be between 2.5 and 3.5 with a thickness that can range from 500 angstroms to 10,000 angstroms usual cure is 400 deg c in nitrogen the new material could be cured at a lower temperature of about 200. I know a company Filmtronics that can supply the SOG and there is the new material they have that will go slightly over 10.000 angstroms ready for use in the near future. If you have interest for this you could call 724 352 3710. For the BCB or Polyimide the people at Futurrex in New Jersey might be able to help you. they could take the time to explain what might work as they make pos and neg resists and other polymers, Mr Sobcheck is the person to talk to about crosslinking with UV. I am sure that he would have some interesting comments. Wish you good luck, Neal At 10:02 AM 6/29/2005 -0400, you wrote: >Dear All > >I am looking for some dielectric as gate insulator. >As far as I can tell from reading the list archives, the most common are: >1) BCB >2) Spin-on glass >3) Polyimide >After depositing the dielectric, I will need to do e-beam lithography >(PMMA as resist and MIBK as developer) and evaporate metallic gates. >The highest temperature I would like to use for curing should be <=200 >Celsius and the dielectric should be <500 nm thick. >Can anyone suggest if any of the above dielectric might be >better than the others? Also, has anyone ever used additives to >cross link PMMA with UV >Thank you very much > >Fabio > >-- >Fabio Altomare >Post Doctoral Research Associate >Physics Department >Duke University Neal Christensen 675 Saxonburg Rd. Box 1571 Butler, PA 16003-1571 USA T-724-352-4433 F-724-352-7680 neal@zbzoom.net work tel 724 - 352+3710 work fax 724-352+1772 nchristensen@filmtronics.com