Re: [mems-talk] Reg: problems with SU-8 bonding to the silicon wafer

Reg: problems with SU-8 bonding to the silicon wafer

2005-06-23

2005-06-23

2005-06-23

Thin PDMS Films

2005-06-24

2005-06-25

2005-06-27

2005-06-23

2005-06-24

2005-06-27

2005-06-29

2005-06-30

Reg: problems with SU-8 bonding to the silicon wafer

Vishwanath Somashekar

2005-06-30

Hi,
Is it ok if I used SU8-2025 on the base layer and SU8-2000 on the top
layer. If not, what precautions do I need to take

Thanks
Vishwa