Yes, I deposited one side of my wafer(not prime one) with 1um nitride, and
then put it in the oxidation furnace to grow 0.4um oxide on the other side
of my wafer.

On 10/8/05, yuzhul@eden.rutgers.edu  wrote:
>
> If one side of the wafer has 1um PECVD nitride, nitride will prevent
> oxidation.
> Duan, do you mean get 0.4um oxide from the backside
> of the wafer?