Hi, Andrew,

   It's a 15mW He-Cd laser. I don't know what stable mode is.
   Thank you for your reply.

Richard

----- Original Message -----
From: "Andrew Xiang" 
To: "General MEMS discussion" 
Sent: Thursday, January 19, 2006 7:33 AM
Subject: Re: [mems-talk] SU-8 layer is curved up during postbake


> What kind of laser do you use for 320nm?
> Gas laser or solid state?
> power?
> Does it have stable mode?
>
> -Andrew
>
> ----- Original Message -----
> From: "Richard Chang" 
> To: "General MEMS discussion" 
> Sent: Tuesday, January 17, 2006 1:19 PM
> Subject: [mems-talk] SU-8 layer is curved up during postbake
>
>
>> Hi, All,
>>
>>   I expose a thick SU-8 2100 layer with a 320nm laser. After postbake, I
>> found out the layer is curved up.
>>   The picture is shown in the link below.
>>
>>   http://base.google.com/base/items?oid=15423750006658009412