I am not sure of the temperature (probably just above the Tg of quartz which I think is around 1200) but you may want to look at some low temperature techniques. There are methods using dilute HF which allow bonding at much lower (even room temperature). I believe there was a similar discussion here not that long ago so try searching the archives. Gareth rajiv bharadwaj wrote: >All, > >What is the optimum bonding temperature for quartz bonds? I have tried 1100 >degree C for making microfluidic channels. However, I observe leakage of >current between two closely lying channels over time. I suspect the bonding >between the substrates in failing. > >Has anyone had a similar experience? Any suggestions on this matter would be >appreciated. > >