If you are sure the bonded surfaces were be very very clean, you might try
it applying some pressure to the bonded parts.

Good luck,

Hongjun

--------------------------------------
Hongjun Zeng, PhD
MEMS/Nano Scientist
Nanotechnology Core Facility
(NCF formerly MAL)
University of Illinois at Chicago
3064 ERF Building
842 W. Taylor St., Chicago, IL 60607
Tel. 312-355-1259, Fax: 312-413-0447
------------------------------------

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of rajiv bharadwaj
Sent: Sunday, March 19, 2006 9:20 PM
To: General MEMS discussion
Subject: [mems-talk] quartz-quartz bonding

All,

What is the optimum bonding temperature for quartz bonds? I have tried 1100
degree C for making microfluidic channels. However, I observe leakage of
current between two closely lying channels over time. I suspect the bonding
between the substrates in failing.

Has anyone had a similar experience? Any suggestions on this matter would be
appreciated.