Hi, All, Does anybody know if RIE can pattern cross-linked SU-8? I look at microchem's website and RIE can be used to remove SU-8. The problem is the high power is needed. Also, it's for removal, not patterning. Our RIE system can provide up to 500 W and the max O2 flow rate is 10 sccm. Does anybody can provide the recipe? Thank you in advance. Richard