SU-8 is virtually transparent to g-line (effectively zero absorption of wavelengths above 390 nm), and is non-reacting with it. Best Regards, Chad Brubaker -----Original Message----- From: Matteo Dainese Sent: Friday, April 07, 2006 7:50 AM To: mems-talk@memsnet.org Subject: [mems-talk] G-line for SU-8 Hello, has anybody experience in exposing SU-8 using a g-line stepper (the only we can use)? We would need to use thin films (<5µm) of SU-8 for making optical waveguides, but we found no evidence in publications whether the absorption would be enough for a good exposure. Thanks for your comments.