Hi, I'm trying to patter a very thin silver film using photolithography. I am having a few problems. 1. After developing S1811 in MF 321 (contains TMAH), I cannot seem to etch silver in HNO3. Does TMAH react with Ag? Can I just use TMAH to etch silver? 2. Is there a better way to etch silver than using HNO3? I've tried I2:KI:H2O but I fear that this may be reacting with my PMMA layer which sits between my silver layer and substrate. Any advice would be appreciated. Thanks, Kevin