Hi, all,

I am designing a structure (a PDMS film bridge over a trench).  I need to make
a trench and fill it with some material(PSG,SOG,SU-8???...), and then spin
PDMS on it and pattern. the trench is 1000um*1000um and 30-40 microns in
depth.
Can anyone tell me which material is fine for filling a 40um-deep trench, and
what are the steps.

I also want to know whether there are some good ways to etch PDMS. does O2
plasma work? I found a paper that used scratching and lift-off, but i dont
think the surface will be very smooth after scratching.

I just searched on the internet/IEL, but failed to find good ways on it.

Thanks a lot,

Jianhua
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jh.tong@utoronto.ca
tongjh@student.dlut.edu.cn