Su-8 should be cured at 65degree celcius for 15 mins
and then 95 degree celcius for 3 hrs.It should not go
more than 100 degree or Su-8 will crack.

--- "J.J wang"  wrote:

> Hi, Dear all
> Right now I am using SU-8 100 as one of my structure
> layers. I want the SU-8 layer to be as thick as
> possible and it need to stay after the process. My
> spinning speed is about 1000 rpm for 30s, the
> approximate thickness is around 200 um. I tried to
> cure it in nitrogen oven at 250 degree for 3 hours,
> but the SU-8 cracked.
>
> Does anyone by chance know the full cure heating
> profile ?