Hi J.J wang wrote: > Thank you all for your generous helps. > > After the expose, PEB and developing, should I do some further bake ? Since I the SU-8 100 to stay as the mechanical structure and it needs to have some robustness. [..] You can hard bake it at 150-200 degrees celsius but use a temperature ramp or steps. You might also want to have a look into the data sheet of your SU-8 supplier, e.g. Microchem has them here (on the right side): http://www.microchem.com/products/su_eight.htm cu Michi -- Michael Riss Parc Científic de B., Lab. Nanobio Universitat Politècnica de Catalunya C/ Josep Samitier 1-5 08028 Barcelona, Spain EMail: mriss@pcb.ub.es Tel. +34 93 40 37 185 Fax. +34 93 40 37 181