Sreemanth You can get a uniform film by evap of silica on even larger sample. Hoever, the film will have pinholes and defect in it. Any particle with diameter larger than ~5nm that is there after sample prep or that get there during pumping will result in a pinhole since the directional property of evap will cause it no to be totally buried. Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Sreemanth M Uppuluri Sent: ד 30 אוגוסט 2006 15:21 To: mems-talk@memsnet.org Subject: [mems-talk] Evaporation of Silica Hello Everyone, I am trying to coat silica films on my samples using e-beam evaporation. I need a very thin coating (< 20 nm). I am wondering if this thickness is adequate to ensure coverage over my entire sample (0.5" * 0.5"). Please let me know if you have any pointers in this matter.