We have had success with vacuum cavitational streaming in removing some stubborn resists. Drop me an email at hyperflo@hyperflo.com if you want to discuss further or see a paper on the subject. Jack -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Jan Michael Kubr Sent: Wednesday, August 30, 2006 10:44 AM To: General MEMS discussion Subject: [mems-talk] hardbaked photoresist... I have a problem in that I cannot get hardbaked PR (SPR-220) of my surfaces, both gold and Si. With the gold sitting on TiW, piranha is not really a feasible solution. I have tried long o2 plasma ashes and overnight baths in heated prs-3000 with little success. Any other solutions I can try?