Hi Martyn, is it possible that you would require a descum step before the wet etch? I fabricate gratings of a similiar period and my process requires and O2 plasma or O3 descum before wet etching to insure the resist is really clear in the troughs. I am assuming you have a 50% duty cycle of the gratings and it is sometimes difficult to clear out the troughs when you have a sinusiodal profile. Lastly, are you using an anti-reflection coating? Patterning on metal can be challenging. Good luck, Scott ----- Original Message ----- From: "Martyn Gadsdon"To: Sent: Tuesday, September 19, 2006 5:00 AM Subject: [mems-talk] Minimum feature size using wet etching - 3micro-m? > Dear All, > > I am trying to make a nanowire grating using a simple process. I am > spinning a layer of photoresist on top of a ~50nm layer of silver or > aluminium. The photoresist is then exposed and developed to have a > sinusiodal profile, of between 200 and 300nm pitch, where the troughs of > the profile expose the metal underneath. I then aim to etch the exposed > areas of metal using typical chemistries such as H3PO4:HAc:HNO3:H2O to > leave an array of parallel metallic wires of the same pitch. However, I > seem to be having problems and never seem to be able to etch the exposed > areas. > > I have looked into this on the web and came across a short presentation. > > The link is: > > ccms.ntu.edu.tw/~chihiwu/ch09%20rev3.ppt > > and on the slide discussing the disadvantages of wet etching they state: > > "Can’t pattern sub-3micro-m feature" > > I have worked out they are at the National Taiwan University, but I can > not find the actual author's name or email address to enquire directly to > them, so I thought I'd try to see if anyone else can confirm their > statement. > > Can anyone tell me if this is correct and may be the reason why I cannot > wet etch my 200-300nm profiles, and if so perhaps provide a reference I > can look up and quote.