With positive resist and image reversal any wall angle from -22 degrees through vertical to +22 degrees is practical and controllable. Contact me for technical papers and explanations. Bill Moffat, CEO Yield Engineering Systems, Inc. 2185 Oakland Rd., San Jose, CA 95131 (408) 954-8353 -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Ren Yang Sent: Tuesday, October 03, 2006 5:46 PM To: mems-talk@memsnet.org Subject: [mems-talk] How to get vertical sidewall for TOK PMER P-LA900PM? Hello, Can anyone sugguest how to get vertical sidewall for 20um thick TOK PMER P-LA900PM photoresist with broadband light source? The strcutre feature size is 10um. I expose this positive resist with a 1:1 projection exposure system. The numerical aperture of the project lens is 0.14 with 30um DOF and 4um resolution.