Deepa, You might try ultrasonic agitation during the plating cycle. Gary Gary Hillman Service Support Specialties, Inc. 9 Mars Court PO Box 365 Montville, NJ 07045 973-263-0640 973-263-8888. -----Original Message----- From: deepa sree [SMTP:dapisree@yahoo.co.in] Sent: Wednesday, October 04, 2006 7:29 AM To: mems-talk@memsnet.org Subject: [mems-talk] Gold plating through a via hole Hello I am trying to plate gold through a via hole of 100 um in diameter and 125um deep. I am having problems with gold plating solution getting trapped in the hole, though I am plating at a very slow rate. I wanted to know is there a way to overcome this or is there any other method to make a through hole contact. There is layer of Ti and a layer of sputtered gold in the via to which I want to make a contact.