Hello, I would like to create a series of rows of short, round pillars out of SU-8. I would like the pillars to be 12 microns in diameter and 5 microns high. Does anyone have an estimate as to how close I could get the individual pillars to each other? I am planning on using a chrome-glass mask on a Karl Suss MA6/BA6 contact aligner. Thank you, Kevin ------------------------- Kevin V. Christ Turner Research Group, http://ktgroup.me.wisc.edu Department of Mechanical Engineering University of Wisconsin, Madison -------------------------