Kevin, if the MA6 is tuned well 2u min space should be easy shay Original Message: ----------------- From: Kevin Christ kchrist@wisc.edu Date: Mon, 09 Oct 2006 11:28:25 -0500 To: mems-talk@memsnet.org Subject: [mems-talk] Small SU-8 Pillars Hello, I would like to create a series of rows of short, round pillars out of SU-8. I would like the pillars to be 12 microns in diameter and 5 microns high. Does anyone have an estimate as to how close I could get the individual pillars to each other? I am planning on using a chrome-glass mask on a Karl Suss MA6/BA6 contact aligner.