Thank you for reply. I can't use gold right now. could anyone tell the solution to remove Al layer without any damage to PMMA? Otherwise, could anyone tell me another way to use glass substrate in E-beam lithography? Thank you. On 10/13/06, Mathieu Foquetwrote: > Any reason you're not using 5 to 10nm gold and then use a mix of KI/I2 > gold etch. I have asimilar ebeam process and this recipe has worked well > for me. > > To my knowledge, Aluminium is more delicate to remove without moving to > aggressive chemistries that would also affect your pmma.