Did you consider something like espacer by showa denko? It is a conductive water-soluble polymer. Mathieu ________________________________ From: mems-talk-bounces@memsnet.org on behalf of Hyunsoo Park Sent: Sun 2006-10-15 11:39 PM To: General MEMS discussion Subject: Re: [mems-talk] To remove Al layer from PMMA/glass substrate Thank you for reply. I can't use gold right now. could anyone tell the solution to remove Al layer without any damage to PMMA? Otherwise, could anyone tell me another way to use glass substrate in E-beam lithography? Thank you.