Dear MEMS community, I am using a RF magnetron sputtering system to deposit Al and Cu film on silicon substrate. The recipe is: Ar flow rate: 80 sccm RF power: 150 Watt Base pressure:3e-3Pa Pocess pressure: 0.8Pa The Cu can be successfully deposited, but there is no Al deposited on the silicon substrate after 30 min sputtering. Would anyone give me an reasonable explanation or any suggestion or some tricks about that? Thanks in advance. ------------------------------ Sincerely yours, Qiao-Da-Yong Northwestern Polytechnical University M/NEMS Lab. P.O. Box 638, No.127 West FriendShip Road, Xi'an P.R. China ZipCode:710072 Tel£º86-029-88460353-8112 E-mail£ºdyqiao@nwpu.edu.cn