durusmail: mems-talk: Re: who can do 8um oxide deposition on 4" wafers ?
Re: who can do 8um oxide deposition on 4" wafers ?
1998-05-22
1998-05-22
Re: who can do 8um oxide deposition on 4" wafers ?
Philipp Quaderer
1998-05-22
We are able to produce silicon wafers with a 10  to 25 microns thick
SiO2 layer in a optical quality for planar wave-guides:
Contact:
Sico Meiningen Wafer Gmbh
Germany
Tel +49 3693 71313
Fax + 49 3693 71315
Ms. Peggy Nauert


Richard A. Brown wrote:

> Does anyone know where I can get ~8 microns of SiO2 deposited on
> some 4" wafers ?
>
> (We could do it here by LPCVD, but with 3% silane it would take a very
>
> long time...  Spin-on glass is certainly an option, but for these
> wafers
> I'd prefer to avoid it.)
>
> Thanks in advance,
>
> - r.
> ----
>


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