Richard, This is Nalin Parikh. How are you? Glad to hear from you. For oxide deposition I guess MCNC still works with 4 " wafer and someone can do there. Call MCNC and see if you can find out. If you have any difficulty, let me know. Nalin >Does anyone know where I can get ~8 microns of SiO2 deposited on >some 4" wafers ? > >(We could do it here by LPCVD, but with 3% silane it would take a very >long time... Spin-on glass is certainly an option, but for these wafers >I'd prefer to avoid it.) > >Thanks in advance, > >- r. >