Hi Prakash, I haven't tried SU-8 on thermal oxide specifically, but I'd suggest trying a dose of strong oxygen plasma on the oxide surface before coating. -Joe Prakash Mukre wrote: > Hi All, > > I am trying to deposit SU-8 over thermal oxide. SU-8 is part of the final > device I am fabricating, so I want it to adhere to the substrate strongly. > But with my current recipe SU-8 delaminates after development. Following > are > the some process specs I am following. > > SU-8 2100 Thickness: 200-250um > Softbake: 15min @65C, 100min @95C. > UV Dose: I have tried 400mJ/cm2 to 1000mJ/cm2 > Hard Bake: 5min @65C, 20min @ 95C. > Development time: 10-20min. > > I have tried using primers like HMDS, P20. Also I have tried using Omicoat. > What could be the possible reason for this? or SU-8 does not adhere to > thermal oxide at all?