One simple way out of the coil is to put a wire bond pad in the center
of the coil, if you have enough room. =20


Regards,
=20
Steve Adamson
Market Manager, Asymtek
IMAPS President Elect 2007
=20
760-930-7274 Office
760-802-1641 Cell
ADAMSON14645 Skype


-----Original Message-----

  From: "Homan, Tony J" 
Subject: [mems-talk] Integrated Inductors
To: "General MEMS discussion" 
Message-ID:
 <7957FC94D9ACFE4A9431B8CA6B87AA88F2F2DC@EVS2.ms.rose-hulman.edu>
Content-Type: text/plain; charset=3D"us-ascii"

Hi everyone-

I am attempting to create an integrated inductor (just a few coils on my
substrate), and I was curious if anyone had experience with this or
something similar.  My main problem is how to get the wire back out from
the middle of the coil.  I was thinking I could make a line of metal to
the center of my coil, and then cover it with some material allowing the
next metallization to just go over that part.  I just don't know what
material would be best suited for this.  Please let me know if you have
any suggestions.