durusmail: mems-talk: Adhesion BPR100 resist on AuZn
Adhesion BPR100 resist on AuZn
2007-01-12
2007-01-12
Adhesion BPR100 resist on AuZn
P.E.M. Kuijpers
2007-01-12
Hello,

Does anyone know how to improve the adhesion of BPR100 resist (20µm) on an
200nm AuZn layer. At this moment patterns are flushed away during
spraydevelopment.

Thanks in advance.
Peter Kuijpers
Philips Applied Technologies
mailto:p.e.m.kuijpers@philips.com

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