3 micro SiO2 will crack due to the residual stress. My suggestion is to deposit it three times, 1 micro each time with an annealling at 950 degree C. >From: "Andrea Mazzolari">Reply-To: mazzolari@fe.infn.it, General MEMS discussion >To: mems-talk@memsnet.org >Subject: [mems-talk] SiO2 lpcvd deposition >Date:Sat, 13 Jan 2007 20:30:40 +0100 (CET) > >Hi all. I need to deposit 3 micron of LPCVD SiO2. My gas sources are > diclorosilane (DCS) and O2. Could you suggest me the best deposition > conditions in order to obtain the highest possible deposition rate ? > References to articles will be very appreciated.