durusmail: mems-talk: Spin coating PDMS on wafer
Spin coating PDMS on wafer
2007-03-26
2007-03-27
2007-03-26
2007-03-27
Spin coating PDMS on wafer
Peng Li (Paul)
2007-03-26
Dear friends,

I want to spin coat PDMS on glass wafer to get 50um thickness layer. Does
anybody know where can I find data of PDMS thickness corresponding to spin
speed?
Thanks!

Peng


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