Try the Manufacturer.

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Peng Li (Paul)
Sent: Monday, March 26, 2007 1:49 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Spin coating PDMS on wafer

Dear friends,

I want to spin coat PDMS on glass wafer to get 50um thickness layer.
Does
anybody know where can I find data of PDMS thickness corresponding to
spin
speed?
Thanks!

Peng


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