Do an Google search for "etch rates micromachining" and look at the papers
publishing in JMEMS.
Several resists, silicon oxides, and etchers are evaluated.
    --Kirt Williams

----- Original Message -----
From: "prabhu arumugam" 
To: "General MEMS discussion" 
Sent: Thursday, July 12, 2007 10:05 AM
Subject: [mems-talk] plasma etching of SiO2 and its selectivity over resists

> Hello all,
> Could you please tell me some good references for
> plasma etching of SiO2 and its selectivity over
> resists.