durusmail: mems-talk: dry etch recipe for Prolift100 polyimide (Brewer Science)
dry etch recipe for Prolift100 polyimide (Brewer Science)
2007-08-17
dry etch recipe for Prolift100 polyimide (BrewerScience)
2007-08-18
dry etch recipe for Prolift100 polyimide (BrewerScience)
2007-08-20
dry etch recipe for Prolift100 polyimide (Brewer Science)
Jill Yang
2007-08-17
Anyone used Brewer Science's polyimide (prolift-100)? How to dry etch a
"clean" via without residue? Oxygen plasma with photoresist mask doesn't do
a good job --- lot of grass at the bottom of the via.

Thanks.
-Jill

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