>From: bobhendu@aol.com >Reply-To: General MEMS discussion>To: mems-talk@memsnet.org >Subject: Re: [mems-talk] dry etch recipe for Prolift100 polyimide >(BrewerScience) >Date: Fri, 17 Aug 2007 12:42:34 -0400 > >You probably need to add about 3-5% CF4 to your receipe. That should be >enough to etch the carbon filler material used in most polyimide >formulations. Bob Henderson > Yes, I guess we all know that additional CF4 "should" remove the grass. But in fact it doesn't work well.