Look to :Dieter K. Schrode: Semiconductor Materials and Characterization ,
by Wiley. and any refereence papers on micr0-electro-mechanical-systems (MEMS.

See S. M. Sze: Semiconductor Sensors, by Wiley 1994, pp 535-536
Wen Ko

At 03:09 PM 8/4/98 -0400, you wrote:
>
>My partner and I are undergraduate students who are working on a summer
>project, the design of a MEMS accelerometer, for our prof.  We would like
>to perform some CAD simulations of a silicon beam, but are lacking several
>of the values for silicon's mechanical properties.  We're not looking
>for highly detailed values, but some rough, crystal orientation
>averaged numbers that would give us reasonable results.  Can anyone
>recommend us to a good reference book, journal articles, web site, etc.
>Even better, if someone has already performed some computer simulations,
>we'd be grateful if you could share the property values used and how they
>compared to the reality.
>
>Much obliged.
>
>
>              *    "And then the storm breaks, and it is not thunder at
>Brian Cheung   *     all, but that entropic inner-ear whine of molecules
>U of Toronto   *     breaking apart and whirling away."
>EngSci 0T0     *                               -- Evolution's Shore
>               *                                  Ian McDonald
>
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